Publications

Copper Atomic Layer Deposition using in situ-Generated Cu₃Cl₃ and Hydrogen Radicals

M. D. Groner and S. M. George, in preparation, 2005.

Low Temperature Al₂O₃ Atomic Layer Deposition

M. D. Groner, F. H. Fabreguette, J. W. Elam, and S. M. George. Chemistry of Materials, Volume 16, pp. 639-645, 2004.

Electrical Properties of Tungsten/Alumina Bilayers Grown by Atomic Layer Deposition: Influence of the Film Roughness

F. H. Fabreguette, M. D. Groner, Z. A. Sechrist, and S. M. George. In press, 2005.

High k Dielectrics Deposited by Atomic Layer Deposition: Capacitors and Gate Applications
     M. D. Groner and S. M. George in Interlayer Dielectrics for Semiconductor Technologies,
     S. P. Muraka, M. Elizenberg, and A. K. Sinha, ed., Academic Press, 2003.

Viscous Flow Reactor with Quartz Crystal Microbalance for Thin Film Growth by Atomic Layer Deposition
     J. W. Elam, M. D. Groner, and S. M. George, Review of Scientific Instruments, Volume 73, pp. 2981-2987, 2002.

Electrical Characterization of Thin Al2O3 Films Grown by Atomic Layer Deposition on Silicon and
Various Metal Substrates
     M. D. Groner, J. W. Elam, F. H. Fabreguette, and S. M. George, Thin Solid Films, Volume 413, pp.186-197, 2002.

Electron Transfer at n-Silicon/Methanol Interfaces: Effects of Ferricenium Pretreatment and
Silicon Dioxide Overlayers
     M. D. Groner and C. A. Koval, Journal of Electroanalytical Chemistry, Volume 498, pp. 201-208, 2001.

Fabrication and Characterization of 4H-SiC MOS Capacitors with Atomic Layer Deposited (ALD) SiO2
I. Perez, J. Elam, M. Groner, J. T. Torvik, and B. Van Zeghbroeck,
     Proceedings 2000 IEEE/Cornell Conference on High Performance Devices, pp. 144-147, 2000.

Further Investigation of the Reduction of Alkyl Bromides at p-InP Photocathodes. Hot or Thermalized Electrons?
     M. D. Groner, D. K. Watts, and C. A. Koval., Journal of the Electrochemical Society,
     Volume 144, pp. 1690-1696, 1997.

Pocket Semiquinonate Complexes of Cobalt(II), Copper(II), and Zinc(II) Prepared with the
Hydrotris(cumenylmethylpyrazolyl)borate Ligand
     M. Ruf, B. C. Noll, M. D. Groner, G. T. Yee, and C. G. Pierpont, Inorganic Chemistry, Volume 36,
     pp. 4860-4865, 1997.

Identification of Major Water-Soluble Fluorescent Components of Some Petrochemicals
     M. Groner, A. R. Muroski and M. L. Myrick, Marine Pollution Bulletin, Volume 42, Issue 10, pp. 935-941, 2001.

Raman and Far-Infrared Spectra, Conformational Stability, and Ab Initio Calculations for Oxalyl Fluoride
     J. R. Durig, J. F. Davis, M. D. Groner, and Aiying Wang. Journal of Raman Spectroscopy, Volume 27,
     pp. 841-852, 1996.

Oral Presentations

Gas Diffusion Barriers on Polymer Films Using Al₂O₃ Atomic Layer Deposition

M. D. Groner, C. A. Wilson, J. D. Ferguson, and S. M. George

American Vacuum Society 51st International Symposium, Anaheim, CA, Nov. 14-19, 2004.

Copper Atomic Layer Deposition using in situ-Generated Cu₃Cl₃ and Hydrogen Radicals

M. D. Groner and S. M. George

American Vacuum Society 50th International Symposium, Baltimore, MD, Nov. 2-7, 2003.

Copper Atomic Layer Deposition using in situ-Generated Cu₃Cl₃ and Hydrogen Radicals

M. D. Groner and S. M. George

AVS Topical Conference on Atomic Layer Deposition "ALD 2003", San Jose, CA, August 4-6 2003.

Low Temperature Al₂O₃ Atomic Layer Deposition

M. D. Groner, F. H. Fabreguette, J. W. Elam, and S. M. George

American Vacuum Society 49th International Symposium, Denver, CO, Nov. 4-8, 2002

Electrical Characterization of Ultrathin Al2O3 Films Grown by Atomic Layer Deposition
M. D. Groner, J. W. Elam, and S. M. George
2nd International Conference on Microelectronics and Interfaces, Santa Clara, CA,  February. 7-8, 2001

Electrical Characterization of Ultrathin Alumina Films Grown by Atomic Layer Deposition
in a Viscous Flow Reactor
M. D. Groner, J. W. Elam, and S. M. George
American Vacuum Society 47th International Symposium, Boston, MA,  October 2-6, 2000.

Effects of SiO2 Overlayers on Electron Transfer at n-Si Electrodes.
M. D. Groner, and C. A. Koval.
40th Rocky Mountain Conference on Analytical Chemistry, Denver, CO,  July 25 to August 2, 1998

Overlayers on Semiconductors.
M. D. Groner and C. A. Koval.
Rocky Mountain National Conference, Denver, CO,  August 3-7, 1997.

Poster Papers

Electrical Characterization of Ultrathin Al2O3 Films Grown by Atomic Layer Deposition
M. D. Groner, J. W. Elam, and S. M. George
AVS Topical Conference on Atomic Layer Deposition "ALD 2001", Monterey, CA,  May 14, 2001

Further Investigation of the Reduction of Alkyl Bromides at p-InP Photocathodes. Hot or Thermalized Electrons?
M. D. Groner and C. A. Koval
3rd International Meeting on New Trends in Photoelectrochemistry, Estes Park, CO,  May 11-14, 1997

Electricity Production at a Thin-Film Solar Cell on an ATR Cell
M. D. Groner, N. Dhere, and M. L. Myrick
Pittsburgh Conference, Atlanta, GA,  April 1993